Leach, Richard.

Optical Measurement of Surface Topography edited by Richard Leach. - Chennai: Springer, 2011. - xiii, 323 pages;

Introduction to surface texture measurement -- Some common terms and definitions -- Limitations of optical 3D sensors.- Calibration of optical surface topography measuring instruments.- Chromatic confocal microscopy -- Point autofocus instruments.- Focus variation instruments.- Phase shifting interferometry.-  Coherence scanning interferometry -- Digital holographic microscopy.- Imaging confocal microscopy.- Light scattering methods.

9783642120121 9783642120114 (print)


Microwaves.
Surfaces (Physics).
Materials Science.
Characterization and Evaluation of Materials.
Microwaves, RF and Optical Engineering.
Measurement Science and Instrumentation.
Surfaces and Interfaces, Thin Films.

910 / LEA/O