Optical Measurement of Surface Topography
edited by Richard Leach.
- Chennai: Springer, 2011.
- xiii, 323 pages;
Introduction to surface texture measurement -- Some common terms and definitions -- Limitations of optical 3D sensors.- Calibration of optical surface topography measuring instruments.- Chromatic confocal microscopy -- Point autofocus instruments.- Focus variation instruments.- Phase shifting interferometry.- Coherence scanning interferometry -- Digital holographic microscopy.- Imaging confocal microscopy.- Light scattering methods.
9783642120121 9783642120114 (print)
Microwaves. Surfaces (Physics). Materials Science. Characterization and Evaluation of Materials. Microwaves, RF and Optical Engineering. Measurement Science and Instrumentation. Surfaces and Interfaces, Thin Films.